Course Description

MS635: Semiconductor Integrated Process Design

Since unit processes for VLSI manufacturing are related to each others, it is necessary that semiconductor engineers have a deep understanding about issues between the VLSI process integration and device operation. This course provides basic science underlying unit process steps, particular engineering in achieving required device performances, and the tradeoffs in optimizing device performance and enabling manufacturing. It assumes that the student has already acquired an introductory understanding of the semiconductor device physics.