Based on the fundamental MEMS (micro electro-mechanical system) technology, various microfabrication processes are introduced and processed in the clean room. It covers mask design, photolithography, thin film deposition / etching, bulk microfabrication, and X-ray mask fabrication, which provide a base for independent MEMS research. It also covers recent interdisciplinary subjects such as microfluidics, piezo-MEMS, optical - MEMS, and Bio-MEMS.